P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy StdTpc-Leadframes SEMI MF1366-02 (first SEMI publication)

SEMI MF1366-02 (first SEMI publication)

SEMI M54-0319 (technical revision)

this Safety Guideline may be used to evaluate subsystems to determine if integrating them into a PLHS will cause the PLHS not to conform to this Safety Guideline

and so forth) are dealt with by other SEMI Standards

originally published in 1996

P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy StdTpc-Leadframes SEMI MF1366-02 (first SEMI publication)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This procedure is a graphite furnace atomic absorption analytical method for tin in photoresist. The applicable concentration range is 0. 1 to 1 ppm when the sample is diluted one to ten. The precision was found to be