TEL Tokyo Electron WCPL/TRS Chill Plate Transition Stage Station Lithius Working Acopian Power Supply Part No:

Acopian Power Supply Part No: U24Y350

Part No: 90-2608

Part No: 145-013349-003

Therma-Wave 37658-01 Interconnecting P-62 Board PCB OPTI-PROBE OP 7341 Working

Inventory # CONF-1113

TEL Tokyo Electron WCPL/TRS Chill Plate Transition Stage Station Lithius Working Acopian Power Supply Part No:TEL Tokyo Electron WCPL TRS Chill Plate Transition Stage Station Lithius Working Part No: WCPL TRS Water Controlled Chill Plate Process Station Transition Stage Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087 402532 13, BASE ASSY,FRONT 5010 101316 11 FRAME(CPL 1) 1 5010 306509 11 BRACKET 1 5010 306510 11 BRACKET 1 5010 405033 11