Brooks 5964C2MAP45KA Mass Flow Controller MFC Novellus 22-10522-02 Working Spare Part No: E1534F

Part No: E1534F

Part No: 4022 192 71072

Tee Flange: NW16

Estimated Packed Shipping Dimensions: L x W x H = 14” x 14” x 10” @ 7-8 lbs

Inventory # 13743

Brooks 5964C2MAP45KA Mass Flow Controller MFC Novellus 22-10522-02 Working Spare Part No: E1534FBrooks 5964C2MAP45KA Mass Flow Controller MFC Novellus 22 10522 02 Working Spare Inventory # CONJ 1226 Part No: 5964C2MAP45KA Model No: 5964 Series Novellus Systems Part No: 22 10522 02, 02 0624R 029 Range Gas: 20 SLPM, O2 Connector: Card Edge Fitting: 4VCR (1 4") May Require Calibration This Brooks 5964C2MAP45KA Mass Flow Controller is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details