M01700 - SEMI M17 - Guide for a Universal Wafer Grid StdPbc-0315 The subject of this Specification

The subject of this Specification is the activities of a processing location (i

It has been developed to meet the requirements of assemblers using automatic and manual equipment

1 grade nitrogen and argon bulk supply gases

SEMI E19 — Standard Mechanical Interface (SMIF)

SEMI D9-0303 (Reapproved 0709)

M01700 - SEMI M17 - Guide for a Universal Wafer Grid StdPbc-0315 The subject of this SpecificationMaximum allowable slip and other non uniformly distributed defects are frequently specified when procuring polished and epitaxial silicon wafers. SEMI M62 specifies a maximum allowable fraction of the epitaxial wafer surface area that can contain slip. This Guide provides a design for and guidance for use of a wafer grid that facilitates the determination of the fraction of the wafer surface area covered by observed defects. This Guide defines a grid