MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdTpc-Scanning Surface Inspection Systems 1-1218 (Reapproved 0324)

1-1218 (Reapproved 0324)

SEMI G19-0997 (technical revision)

SEMI D36 — Terminology for LCD Backlight Unit

SEMI P21 — Guidelines for Precision and Accuracy Expression for Mask Writing Equipment

509 defines has some ambiguity

MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdTpc-Scanning Surface Inspection Systems 1-1218 (Reapproved 0324)This standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. This document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation. Referenced SEMI