M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers Revision:SEMI M76-0710 - Inactive SEMI MS4-1113 (technical revision)

SEMI MS4-1113 (technical revision)

no entry is required

and location for printed

本目的の達成のため備える必要のある，主たる要素が6つある:

and accuracy)

M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers Revision:SEMI M76-0710 - Inactive SEMI MS4-1113 (technical revision)This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high density integrated