F04600 - SEMI F46 - Revision:Default Title This edition was approved for

This edition was approved for publication by the global Audits and Reviews Subcommittee on March 26

해당 버전의 출판은 2011년 12월 24일 Global Audits and Reviews Subcommittee에 의해 승인되었다

It does not include information on the structure of the message

3の改訂を反映して，0211の出版サイクルにて，SEMI E142の出版年月が改訂された。

SEMI E116 — Provisional Specification for Equipment Performance Tracking

F04600 - SEMI F46 - Revision:Default Title This edition was approved forThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been