E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling StdPbc-0224 1-1020 - Specification for TCP/IP

1-1020 - Specification for TCP/IP Interface for Production Equipment Smart Connection Interface (PESCI)

SEMI E142-1105 (technical revision)

1  The purpose of this Test Method is to standardize the method for measurement of heat resistance in color filters used for flat panel displays (FPD)

4  This Specification defines a way for users to make ad hoc

SEMI C35 — Specification and Guide for Nitric Acid

E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling StdPbc-0224 1-1020 - Specification for TCP/IPThe purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and store 450 mm wafers, as specified by SEMI M74, within semiconductor device manufacturing facilities. This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers. This Document is intended to define a set of requirements to ensure