MF181100 - SEMI MF1811 - Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data StdTpc-Equipment - Facilities Interface originally published June 1998

originally published June 1998

this measurement technique can be applied to other geometrics with proper consideration

and estimation of the variation in thickness across the wafer for both flatted and notched wafers

SEMI M77-1015 (Reapproved 0421)

SEMI E49-0419 (technical revision)

MF181100 - SEMI MF1811 - Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data StdTpc-Equipment - Facilities Interface originally published June 1998There is some confusion in the roughness measurement community concerning the use of estimators and the calculation of power spectral densities (PSDs) from discrete data sets. Use of this Guide can eliminate these differences and result in the use of consistent units for the PSD and related parameters. It also provides a uniform reporting procedure for digital roughness data that can facilitate communication between different workers and different