E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0709 - Superseded This standard is intended to

This standard is intended to set levels of specification for a reusable cassette to ship clean glass substrates and process-added substrates between organizations without compromising substrate integrity

interfaces

It provides the definition for interoperability with respect to SEMI SAN Standard-compliant Sensor/Actuator devices

本スタンダードは，6インチレチクルの出荷，搬送，および保管のために使用する150 mm極紫外線リソグラフィ（EUVL）レチクル用EUVポッドの仕様を記述している。EUVポッドは，外部ポッドと保護用の内部ポッドから構成される。EUVポッドは，従来のレチクルキャリアがEUVLの要件に適合しない場合に使用する。

SEMI MF1726-1103 (first SEMI publication)

E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0709 - Superseded This standard is intended toThis Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards. This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.