E03700 - SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services StdVol-Gases 背景および動機

背景および動機

- The metadata representation of selected SEMI Communication Standards

SEMI E63 — Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

As gate dielectric thickness approaches 1 nm

SEMI D20-93 (first published)

E03700 - SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services StdVol-Gases 背景および動機High Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another. HSMS is intended as an alternative to SEMI E4 (SECS I) for applications where higher speed communication is needed or when a simple point to point topology is insufficient. SEMI E4 (SECS I) can still be used in applications where these and other