P02400 - SEMI P24 - CD測長手順 StdPbc-1020 NOTE 1: The design and

NOTE 1: The design and fabrication of the sawing guides and the determination of any geometrical parameters is considered outside the scope of this Test Method

設備的使用者或其他相關團體也可使用本基準來評估和比較不同設備在設計上的潛藏風險或是附屬設備的設計、評估或修改。

·        プロセスカセットまたはクォーツボートとプロセスチェンバーの底面との間

free space to allow data transmission

This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the CC‑Link IE standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment

P02400 - SEMI P24 - CD測長手順 StdPbc-1020 NOTE 1: The design andNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004711North American Regional Standards Committee20049www. semi. org2004111994 NOTICE: This Standard or Safety Guideline has an Inactive Status because the