MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance Revision:SEMI MS4-1113 - Superseded 9997% quality

9997% quality

selection of materials or detection systems) are to be used to mitigate fire risk

originally published in 1992

SEMI E96-1101 (technical revision)

The purpose of the process equipment adapter plate guide is to provide guidance on the expectations and application for process equipment adapter plates

MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance Revision:SEMI MS4-1113 - Superseded 9997% qualityThe absence of a generally accepted method to determine Youngs modulus has provided a challenge to the microelectromechanical systems (MEMS) community for many years. Without a standard measurement technique, measurements between different laboratories cannot be meaningfully compared. This Standard provides a test method to determine Youngs modulus for thin, reflecting films, based on the average resonance frequency of a single layered cantilever. It