E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces • Helium (He)

• Helium (He)

The purpose of this Standard is to define a test method used to determine the load impedance and efficiency of matching networks used in RF power delivery systems for semiconductor processing equipment

SEMI C36-0301 (technical revision)

The format and algorithms of this code are based on two-dimensional symbology specified in ISO/IEC 16022

SEMI E78-0912 (technical revision)

E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces • Helium (He)global Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1992200411 Referenced SEMI Standards SEMI E12 Standard for Standard Pressure and Standard Temperature for Flow Units Used in Mass Flow Meters and Mass Flow Controllers