E00500 - SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II） Revision:SEMI E5-0611 - Superseded org in June 2007

org in June 2007

SEMI E126-0708 (Reapproved 0518)

SEMI D59-0710 (Reapproved 1224)

SEMI G38-0996 (technical revision)

1-0515 (first published)

E00500 - SEMI E5 - 半導体製造装置通信スタンダード2 メッセージ内容（SECS-II） Revision:SEMI E5-0611 - Superseded org in June 2007NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI SEMI2SECS IIJEIDA12 SECS II1SECS I 6 SECS II SECS IIIC SECS IISECS I SECS II SECS II SECS II Referenced SEMI Standards (purchase separately) SEMI E4 Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS I)