P04300 - SEMI P43 - Photomask Qualification Terminology StdTpc-CIM Framework 3-0600 (technical revision)

3-0600 (technical revision)

and automation equipment

This Document covers requirements for hydrogen chloride used in the semiconductor industry

• Oxygen (O2)

board manufacturers

P04300 - SEMI P43 - Photomask Qualification Terminology StdTpc-CIM Framework 3-0600 (technical revision)This Standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2011. Available at www. semiviews. org and www. semi. org in June 2011; originally published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines