M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals Revision:SEMI M14-89 - Inactive NOTICE: This Standard is no

NOTICE: This Standard is no longer published with the SEMI E54 suite of Standards

This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24

この文書は，SEMI E43および静電気を測定するその他の方法を参照している。

2  Because the fitting locations and procedures differ considerably between the two methods

This Standard is applicable to the terminology of color breakup on the field sequential color display

M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals Revision:SEMI M14-89 - Inactive NOTICE: This Standard is noThe purpose of this document is to present a process for ion implantation, activation, and measurement of the resulting layers so that meaningful comparisons can be made between various lots of semi insulating GaAs. This test will be performed by the supplier so that product may be represented in a standard way. Referenced SEMI Standards None.