G09200 - SEMI G92 - 450 mmウェーハ用テープフレームカセットの仕様 Revision:SEMI G92-0412 - Superseded SEMI G18-86 (technical revision)

SEMI G18-86 (technical revision)

internal reticle movement

provide a map between EFEM functional elements and existing standards

The document provides a framework for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by supplier and purchaser as a reference for EHS considerations

SMN as described in this Specification standardizes an XML notation that can be used for both the logging and documentation of SECS-II messages

G09200 - SEMI G92 - 450 mmウェーハ用テープフレームカセットの仕様 Revision:SEMI G92-0412 - Superseded SEMI G18-86 (technical revision)Assembly & Packaging Global Technical Committee2013822global Audits and Reviews Subcommittee201311www. semiviews. org www. semi. org20124 450mm PGVAGVOHT450mm 450mm450mm(TFC) 1325 3 6 Referenced SEMI Standards SEMI G88 Specification for Tape Frame for 450 mm Wafer