C00355 - SEMI C3.55 - シラン（SiH4），バルク，品質99.994%の仕様 StdPbc-1211 The purpose of the standard
$115.50
Description
The purpose of the standard is to ensure that modules from different suppliers can be integrated into a radial cluster tool
SEMI E69-0298 (Reapproved 0309)
orgで入手可能となる。初版は1995年2月発行，前版は2004年3月発行。
Referenced Standards (purchase separately)
SEMI MF1619-1107 (Reapproved 0718)
C00355 - SEMI C3.55 - シラン（SiH4），バルク，品質99.994%の仕様 StdPbc-1211 The purpose of the standardglobal Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org20002 (SiH4) Referenced SEMI Standards None.
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