F09600 - SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors StdPbc-0709 SEMI E99-0317 (technical revision)

SEMI E99-0317 (technical revision)

Only the ability to describe the fact that a supplier has implemented such a concept and that a client can discover this implementation and any data it can produce is in scope for this Specification

本スタンダードは，global Photovoltaic Committeeで技術的に承認されている。現版は2011年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年6月にwww

SEMI C1- Guide for the Analysis of Liquid Chemicals

These test methods apply to liquid chemical and UPW system components intended for use in semiconductor manufacturing tools and ancillary equipment

F09600 - SEMI F96 - Specification for Port Configuration of Canisters to Contain CVD Precursors StdPbc-0709 SEMI E99-0317 (technical revision)This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on April 22, 2004. Initially available at www. semi. org June 2004; to be published July 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.