C02900 - SEMI C29 - 4.9%フッ化ケイ素酸（10:1 V/V）の仕様とガイドライン StdPbc-0925 Annual summaries of equipment spending

Annual summaries of equipment spending

• Particle Count

orgで，そして2009年11月にCD-ROMで入手可能となる。初版は2000年2月に発行された。

This Terminology covers terms describing generic attributes of MEMS devices and of materials and processes used in their manufacture

The unit in these figures is inch

C02900 - SEMI C29 - 4.9%フッ化ケイ素酸（10:1 V/V）の仕様とガイドライン StdPbc-0925 Annual summaries of equipment spendingGlobal Process Chemicals CommitteeNorth American Process Chemicals Committee19991017North American Regional Standards Committee20012www. semi. org20013SEMI C7. 4C8. 4C12. 319901992199519996 4. 9%4. 9%10: 1 V V 4. 9% Referenced SEMI Standards SEMI C28 Specifications and Guidelines for Hydrofluoric Acid