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E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology By this Standard
E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology By this Standard
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Description
By this Standard
The surface characterization tests to be performed are specified herein
to be published February 1999
SEMI S5-1121 (technical revision)
This Practice is intended for use with all silicon wafer sizes and types when measuring uniformity of film properties and characteristics
E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology By this Standardglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1990200411 (MFCs) Referenced SEMI Standards None.
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