P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様） Revision:SEMI P25-94 (Reapproved 1104) - Inactive SEMI F27-0997 (first published)

SEMI F27-0997 (first published)

To avoid any disturbance of future development and to facilitate interchangeability of diaphragm valves

この文書では，液中パーティクルカウンタの計数効率試験の条件を定義する。

Where there is not significant compensation by impurities of the opposite conductivity type

7の表1に示す帯電の最大推奨レベルを決定する方法について説明する。SEMI E129にある独自の方法，およびこのガイドとSEMI E78の推奨を整合させる更新情報の両方を含んでいる。

P02500 - SEMI P25 - 焦点深度および最適焦点深度（仕様） Revision:SEMI P25-94 (Reapproved 1104) - Inactive SEMI F27-0997 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004816North American Regional Standards Committee20049www. semi. org200411 1994 NOTICE: This Standard or Safety Guideline has an Inactive Status because the