M05700 - SEMI M57 - Specification for Silicon Annealed Wafers StdPbc-0220 within semiconductor device manufacturing facilities

within semiconductor device manufacturing facilities

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SEMI E28-0218 (technical revision)

8-0698 (Reapproved 0615)

M05700 - SEMI M57 - Specification for Silicon Annealed Wafers StdPbc-0220 within semiconductor device manufacturing facilitiesA number of device manufacturers utilize silicon annealed wafers to gain improved device characteristics. This Specification provides information for developing specifications for silicon annealed wafers used to fabricate semiconductor devices and integrated circuits. This Specification covers dimensional, electrical, chemical, and structural properties of silicon annealed wafers for 180 nm, 130 nm, 90 nm, (Table R1 1), 65 nm, 45 nm, 32 nm, (Table R1