F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components StdTpc-Gas Particle Specifications Vendor independence and openness are

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reproducibility

SEMI E88-0303 (technical revision)

org in March 2005

SEMI F72 — Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components

F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components StdTpc-Gas Particle Specifications Vendor independence and openness areThe purpose of this Guide is to identify resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions. The information and conclusions provided are taken from published literature. References are cited. Recommendations are made based on the cited literature, although no opinion is made as to the validity of the cited literature. The