F11400 - SEMI F114 - Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdPbc-1114 which can be commonly used

which can be commonly used independently to the suppliers and models of exposure equipment

SEMI M1-0215 (technical revision)

orgで，そして2008年11月にCD-ROMで入手可能となる。

This Specification is intended to be used with the polished wafer specification (SEMI M1)

SEMI E62-1101 (technical revision)

F11400 - SEMI F114 - Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdPbc-1114 which can be commonly usedThis Document defines a test method for determining organic compounds on the wetted surfaces of ultra high purity (UHP) chemical delivery systems and components. This Test Method is applicable to UHP chemical delivery systems and components. Examples of test samples include valves, regulators, filters, and mass flow controllers, tubing, weld fittings, and face seal fittings. This Test Method could also be used to determine the contamination