E08700 - SEMI E87 - 캐리어 관리 사양 StdPbc-0412 The assumption of wafer-to-wafer (W2W)
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Description
The assumption of wafer-to-wafer (W2W)
SEMI D61-0723 (technical revision)
In the monocrystalline form one crystallographic orientation describes the whole wafer and in the multicrystalline case there is more than one crystallographic orientation present
metallic contribution
1-1109 (first published)
E08700 - SEMI E87 - 캐리어 관리 사양 StdPbc-0412 The assumption of wafer-to-wafer (W2W)Global Information & Control Technical Committee , 2012 12 20 Global Audits and Reviews Subcommittee . 1995 2008 7 . 2013 4 www. semi. org . (coordination), (execution), (completion) . SEMI E15. 1 300 mm . (Document) , (Standard). (Document) : AMHS (vehicles) CarrierID (Carrier) Subordinate Document: SEMI E87. 1 0707 Provisional Specification for SECS II Protocol for Carrier Management (CMS) Referenced SEMI Standards SEMI E15 Specification for Tool
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