Undoped AlN Template on Silicon ( Si <111> P type ) 5mmx5mm x 200 nm - FmAlNonSiBc050505S1FT200nm Ti Polishing: Single side polished with

Polishing:                       Single  side polished with B face

Traverse Speed 5 - 100 mm/sec variable

KF40 Feedthrough with all necessary wire and tube are included to allow operating inside the Glovebox

4 for detail)

Sealing Gasket: PP

Undoped AlN Template on Silicon ( Si <111> P type ) 5mmx5mm x 200 nm - FmAlNonSiBc050505S1FT200nm Ti Polishing: Single side polished withAlN Template on Silicon is made by a PVDNC method. AlN template on Silicon is a cost effective way to replace AlN single crystal substrate. Specifications Useful area: 90% Nominal AlN thickness: 200nm 10%, one side coated, undoped AlN film Front Surface: <1nm RMS, as grown Back surface: silicon as received AlN orientation: C plane (00. 1) Macro Defect Density: <1 cm^2 Wafer base: Silicon [111] P type, 5x5 x0. 5 mm, one side polished