P01500 - SEMI P15 - 原子吸光分光法によるポジティブフォトレジスト・メタルイオンフリー（MIF）現像液中のナトリウムとカリウムの測定 Revision:SEMI P15-92 (Reapproved 1104) - Inactive SEMI MF1727-0304 (technical revision)

SEMI MF1727-0304 (technical revision)

The maximum number of tape frame wafers of both metal (SEMI G74) and plastic (SEMI G87) stored in the container shall be 13

it is assumed that any products to be evaluated have passed all relevant chemical and physical testing before such functional testing

and followed by counting in accordance with the Test Method SEMI MF1810

The nominal volume of the canister which is over 40 liters is exempted from the scope

P01500 - SEMI P15 - 原子吸光分光法によるポジティブフォトレジスト・メタルイオンフリー（MIF）現像液中のナトリウムとカリウムの測定 Revision:SEMI P15-92 (Reapproved 1104) - Inactive SEMI MF1727-0304 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004711North American Regional Standards Committee20049www. semi. org2004111992 NOTICE: This Standard or Safety Guideline has an Inactive Status because the