Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Correction of the language used
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Correction of the language used to describe requirements for interpretation of results during a verification dose experiment in the second paragraph in 7
This Part of this European Standard specifies requirements for firing systems for oil and gaseous fuels applicable to shell boilers
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by testing with a single specified load applied to the stylus to assess compliance with a particular specification
g) liberated gases
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Correction of the language usedWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
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