TEL Tokyo Electron BX80-070342-13 PCB Module LM CONT 3D81-000020-15 Trias Spare Daughterboard 2 Part No: 603276-100

Daughterboard 2 Part No: 603276-100 (Qty

Model No: RF-30SWC

Otherwise the physical condition of the tank is good

Inventory # CONF-1087

070-210400

TEL Tokyo Electron BX80-070342-13 PCB Module LM CONT 3D81-000020-15 Trias Spare Daughterboard 2 Part No: 603276-100TEL Tokyo Electron BX80 070342 13 PCB Card Module LM CONT 3D81 000020 15 Trias Part No: BX80 070342 13 Model No: LM CONT BX81 070094 13 Removed from a TEL Tokyo Electron Trias TB SPA CVD Complete Transfer System Made in Japan Installed PCB Cards Part No: BX80 070373 11, TYB513 1 IOGS, 3D08 000019 12 Part No: 3D81 000020 15, TYB514 1 IO48, 3D08 000020 12 (Qty. 3) This TEL Tokyo Electron BX80 070342 13 PCB Card Module LM CONT 3D81 000020 15 Trias is